{探針系統|探針臺| 200mm探針臺|微波探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺| 4點探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} [/ wpts_spin]

{探針系統|探針臺| 200mm探針臺|微波探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺| 4點探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試}

?{探針系統|探針臺| 200mm探針臺|微波探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺| 4點探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試}

?{探針系統|探針臺| 200mm探針臺|微波探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺| 4點探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|晶片探針測試|手動探針臺|微波探針|真空探針臺|晶片測試} | {探針系統|探針臺| 200mm探針臺|微波探針臺|手動探針系統|手動探針臺| 200mm晶圓探針|真空探針臺|晶圓測試}

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江苏体育e球彩:MPI TS200-SE Probe System

MPI TS200-SE - 200 mm Manual Probe System with ShielDEnvironment™

The MPI TS200-ShielDEnvironment™ (TS200-SE) is designed to ensure advanced EMI/RFI/light-tight shielding, ultra-low noise, low leakage measurement capabilities in a temperature range from -60 to +300°C.

Features & Benefits

ShielDEnvironment™

MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.

MPI ShielDEnvironment™

ShielDCap™

A fully configurable part of the MPI ShielDEnvironment™ which allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations.

Easy to reconfigure with convenient shielding that is MPI ShielDCap™ – a lot of little things which make the difference in simplifying day by day operations.

The complete ShielDCap™ is easily replaceable with the EMI-Shielded version of a probe card holder.

MPI ShielDCap™

Air-Bearing Stage

The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.

MPI TS200-SE - Air Bearing Stage

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
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Unique Platen Lift
with Probe Hover Control™

The highly repeatable (1 μm) platen lift design with three discrete positions for contact, separation (300 μm), and loading (3 mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS200-THZ manual probe system. These features prevent unexpected probe or wafer damage while providing intuitive control, accurate contact positioning, and safety set-up. This capability is especially critical if probes in mmW and sub-THz range are so cost intensive.

Additional Probe Hover Control™ comes with hover heights (50, 100 or 150 μm) for easy and convenient probe to pad alignment.

Unique Chuck Z Adjustment

TS200-SE incorporates in addition to the air bearing XY stage – 5 mm Z chuck adjustment in μm resolution for fine and accurate contact / over-travel control or probe cards drop tip correction.

A 1 mm scale indicator provides easy feedback to the operator. 20 mm pneumatic lift in addition offers easy and continent? loading / unloading procedure.

MPI TS200-SE - Chuck Z Control

Various Chuck Options

The TS200-SE is available with various chuck options to meet different budgets and application requirements:

  • Ambient Chucks: Coaxial, Triaxial or RF with two auxiliary chucks built in ceramic material for accurate RF calibration
  • Various ERS AirCool Chucks from -60°C to 300°C
MPI TS200-SE - Chucks

Thermal Control Integration

The wafer loading door is simply locked at any temperatures below 15°C – this unique feature makes TS200-SE the safest manual probe station in the market.

Furthermore, the thermal chuck can be operated by using the fully integrated touchscreen display, placed at convenient location in front of the operator for fast and operation and immediate feedback.

MPI TS200-SE - Integrated Thermal Chuck Controller Panel

ERS Patented AC3 Cooling Technology Incorporated

These chucks incorporate the ERS patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from “already used” air – reducing dry air consumption up to 30 to 50% as compared to other systems on the market.

ERS Patented AC3 Cooling Technology

Various Optic Options

MPI Optics?are available with a choice between a single tube MPI SuperZoom™ SZ10, the MegaZoom™ MZ12 with up to 12x optical zoom and more than 42 mm working distance or EeyZoom™ ?EZ10 – the 10x optical zoom optic with ergonomic 20x eyepieces, 90 mm working distance and down to 2 μm optical resolving power.

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Unique Upgrade Path

The modular design of theTS200-SE modular creates a unique upgrade path. All TS200-SE probing accessories, such as thermal chucks, microscope and positioners, can be upgraded or reconfigured to variety of application requirements covering tool lifespan for increasingly low cost of ownership.

The MPI TS200-SE probe systems with ShielDEnvironment™ provides maximum EMI shielding and allows for low noise device on-wafer measurements for wide verity of applications such as Device Characterization and Modeling, RF/Microwave, Wafer Level Reliability, Failure Analysis, Design Validation, and High Power.